Granite structure, linear motor gant , stable machine operation, high precision.
Bonding nozzle force control closed-loop, pressure range selectable.
Pulse heating, air-cooled worktable, stable heating/cooling cu es.
Replaceable bonding table.
Bonding accuracy 5-10 microns.
Both upper and lower su aces of the chip equipped with visual imaging for positioning.
UPH 500+ (dened based on actual process).